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- 13:25, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 HDR film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +1 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 13:24, 22 April 2020 diff hist +28 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiN film @250°C Tag: Visual edit
- 11:33, 22 April 2020 diff hist -13 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:33, 22 April 2020 diff hist -131 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:31, 22 April 2020 diff hist -988 Wafer Scanning process Traveler wafers scanning procedure current Tag: Visual edit
- 11:29, 22 April 2020 diff hist -744 Wafer scanning process traveler →Scan before process calibration Tag: Visual edit
- 11:25, 22 April 2020 diff hist -316 Wafer Scanning process Traveler →Wafers to Use Tag: Visual edit
- 11:23, 22 April 2020 diff hist +454 Wafer scanning process traveler →Wafers to Use Tag: Visual edit
- 11:14, 22 April 2020 diff hist -917 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 11:10, 22 April 2020 diff hist +766 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C: correction on Unaxis recipes Tag: Visual edit
- 11:02, 22 April 2020 diff hist -4 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:57, 22 April 2020 diff hist +97 Wafer Coating Process Traveler →Unaxis deposition - SiO2 LDR film @250°C Tag: Visual edit
- 10:37, 22 April 2020 diff hist +151 PECVD Recipes →Historical Particulate Data
- 10:34, 22 April 2020 diff hist +1 PECVD Recipes →Historical Particulate Data
- 17:36, 21 April 2020 diff hist +254 PECVD Recipes →Thin-Film Properties: corrections in Unaxis films Tag: Visual edit
- 17:33, 21 April 2020 diff hist +237 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 13:39, 21 April 2020 diff hist +123 ICP-PECVD (Unaxis VLR) →Documentation: added link Tag: Visual edit
- 13:29, 21 April 2020 diff hist +105 PECVD Recipes →Thin-Film Properties: added one sentence Tag: Visual edit
- 13:25, 21 April 2020 diff hist +116 Wafer Coating Process Traveler →Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 12:28, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:27, 21 April 2020 diff hist -4 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:25, 21 April 2020 diff hist +32 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:24, 21 April 2020 diff hist +34 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:22, 21 April 2020 diff hist -2 PECVD Recipes →SiN 250C deposition (Unaxis VLR)
- 12:21, 21 April 2020 diff hist +37 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:18, 21 April 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:16, 21 April 2020 diff hist -268 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 12:14, 21 April 2020 diff hist +358 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:05, 21 April 2020 diff hist -699 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:03, 21 April 2020 diff hist +418 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 12:02, 21 April 2020 diff hist +49 PECVD Recipes →SiN deposition (PECVD #1) Tag: Visual edit
- 11:55, 21 April 2020 diff hist +120 PECVD Recipes →Standard Recipe
- 11:54, 21 April 2020 diff hist +118 PECVD Recipes →Standard Recipe
- 11:53, 21 April 2020 diff hist +112 PECVD Recipes →Standard Recipe
- 11:02, 21 April 2020 diff hist -21 PECVD Recipes →Standard Recipe Tag: Visual edit
- 11:00, 21 April 2020 diff hist +72 N STD SiO2 recipe Created page with "[https://wiki.nanotech.ucsb.edu/w/images/4/4f/Adv._PECVD2-STD_SiO2.xlsx]" current Tag: Visual edit
- 11:00, 21 April 2020 diff hist +21 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:59, 21 April 2020 diff hist 0 File:Adv. PECVD2-STD SiO2.xlsx Biljana uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx current
- 10:53, 21 April 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:43, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe
- 10:43, 21 April 2020 diff hist +2 PECVD Recipes →Standard Recipe
- 10:42, 21 April 2020 diff hist +92 PECVD Recipes →Standard Recipe
- 10:35, 21 April 2020 diff hist -91 PECVD Recipes →Standard Recipe
- 10:29, 21 April 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 10:24, 21 April 2020 diff hist +69 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:18, 21 April 2020 diff hist +4 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:17, 21 April 2020 diff hist +17 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:16, 21 April 2020 diff hist -293 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 10:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx current
- 10:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 10:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx current
- 10:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 10:04, 21 April 2020 diff hist -9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 10:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 10:00, 21 April 2020 diff hist -241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:59, 21 April 2020 diff hist -90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:58, 21 April 2020 diff hist -1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 09:57, 21 April 2020 diff hist -93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 09:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 09:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx
- 14:10, 20 April 2020 diff hist -181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 13:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 13:49, 20 April 2020 diff hist -855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 13:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 13:32, 20 April 2020 diff hist -132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 11:28, 20 April 2020 diff hist -6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 11:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 11:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit
- 10:39, 20 April 2020 diff hist +330 Wafer Scanning/Coating Process Traveler ( combined/less detailed) Tag: Visual edit
- 10:12, 20 April 2020 diff hist +7 N Wafer Scanning/Coating Process Traveler ( combined/less detailed) wip Tag: Visual edit
- 10:11, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 10:11, 20 April 2020 diff hist +113 ICP-PECVD (Unaxis VLR) →Documentation: scan/coat Tag: Visual edit
- 10:03, 20 April 2020 diff hist +44 PECVD Recipes →" Post-Dep Clean" recipe Tag: Visual edit
- 10:01, 20 April 2020 diff hist -650 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 09:36, 20 April 2020 diff hist +1,374 Wafer Scanning process Traveler scanning wafers Tag: Visual edit
- 09:20, 20 April 2020 diff hist +2,131 N Wafer Scanning process Traveler Scanning wafers Tag: Visual edit
- 08:13, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:11, 20 April 2020 diff hist +5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 08:09, 20 April 2020 diff hist +28 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 14:36, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:36, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx current
- 14:35, 15 April 2020 diff hist -110 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 14:32, 15 April 2020 diff hist +98 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:30, 15 April 2020 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:28, 15 April 2020 diff hist -4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:23, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 14:22, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 14:17, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences Tag: Visual edit
- 14:15, 15 April 2020 diff hist 0 N File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx current
- 14:15, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx current
- 10:08, 15 April 2020 diff hist +82 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit