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- 09:37, 13 March 2014 diff hist 0 N File:PECVD1-SiN data.pdf current
- 17:09, 12 March 2014 diff hist 0 N File:PECVD1 SiN data-February 2014 AFM roughness.pdf current
- 17:06, 12 March 2014 diff hist -38 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 16:55, 12 March 2014 diff hist +9 PECVD Recipes →SiN deposition (PECVD #1)
- 16:53, 12 March 2014 diff hist 0 N File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf current
- 10:10, 11 September 2013 diff hist -49 PECVD Recipes →SiN deposition (PECVD #1)
- 10:09, 11 September 2013 diff hist -21 PECVD Recipes →SiN deposition (PECVD #1)
- 09:55, 11 September 2013 diff hist 0 N File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf current
- 09:55, 11 September 2013 diff hist 0 PECVD Recipes →SiN deposition (PECVD #1)
- 09:53, 11 September 2013 diff hist 0 N File:WIKI PECVD SIN Index,dep.rates,stress.pdf current
- 09:52, 11 September 2013 diff hist +72 PECVD Recipes →SiN deposition (PECVD #1)
- 09:36, 11 September 2013 diff hist +9 Biljana Stamenic
- 09:31, 11 September 2013 diff hist -495 Biljana Stamenic →Current Work
- 09:18, 11 September 2013 diff hist +126 Biljana Stamenic →About
- 09:09, 11 September 2013 diff hist -469 Biljana Stamenic →About
- 11:00, 21 August 2013 diff hist 0 File:Panasonic1-SiO-Etch-SEM.pdf Biljana uploaded a new version of "File:Panasonic1-SiO-Etch-SEM.pdf" current
- 10:52, 21 August 2013 diff hist 0 File:Panasonic1-SiO-Etch-SEM.pdf Biljana uploaded a new version of "File:Panasonic1-SiO-Etch-SEM.pdf"
- 10:52, 21 August 2013 diff hist -74 ICP Etching Recipes →SiO2 Vertical Etch (Panasonic 1)
- 10:46, 21 August 2013 diff hist -6 ICP Etching Recipes →SiO2 Vertical Etch (Panasonic 1)
- 10:45, 21 August 2013 diff hist 0 N File:Panasonic1-SiO-Etch-SEM.pdf
- 10:42, 21 August 2013 diff hist +81 ICP Etching Recipes →SiO2 Vertical Etch (Panasonic 1)
- 10:33, 21 August 2013 diff hist +42 Dry Etching Recipes
- 10:26, 21 August 2013 diff hist +42 Dry Etching Recipes
- 10:17, 21 August 2013 diff hist -130 PECVD 1 (PlasmaTherm 790) →Documentation
- 16:58, 20 August 2013 diff hist -4 PECVD 1 (PlasmaTherm 790) →Documentation
- 16:57, 20 August 2013 diff hist +151 PECVD 1 (PlasmaTherm 790) →Detailed Specifications
- 16:54, 20 August 2013 diff hist 0 N File:Standard recipe SiO2-PECVD.pdf current
- 16:54, 20 August 2013 diff hist 0 N File:Standard recipe SiN-PECVD.pdf current
- 16:40, 20 August 2013 diff hist +68 ICP Etch 1 (Panasonic E646V) →Documentation
- 16:38, 20 August 2013 diff hist 0 N File:Gas Change CF4-SF6-CF4.pdf current
- 16:36, 20 August 2013 diff hist 0 N File:Gas Change CHF3-Ar-3.pdf current
- 16:04, 10 October 2012 diff hist 0 N File:SEM pictures SiO2 100C.pdf current
- 16:03, 10 October 2012 diff hist +72 PECVD Recipes →SiO2 (2% SiH4)
- 16:01, 10 October 2012 diff hist +89 PECVD Recipes →SiO2 (2% SiH4)
- 16:00, 10 October 2012 diff hist 0 N File:SiO2 film Unaxis ICP vs PECVD I.pdf current
- 16:00, 10 October 2012 diff hist +89 PECVD Recipes →SiO2 (2% SiH4)
- 15:52, 10 October 2012 diff hist 0 N File:PECVD2-SiO2Recipe-5W-250C.pdf current
- 15:52, 10 October 2012 diff hist 0 N File:PECVD2-SiO2Recipe-5W-100C.pdf current
- 15:52, 10 October 2012 diff hist 0 N File:PECVD2-SiO2Recipe-5W-50C.pdf current
- 15:51, 10 October 2012 diff hist -3 PECVD Recipes →SiO2 (2% SiH4)
- 15:26, 10 October 2012 diff hist +3 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 14:04, 5 October 2012 diff hist -5 PECVD Recipes →SiN (100% SiH4 )
- 16:53, 3 October 2012 diff hist 0 N File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf current
- 16:53, 3 October 2012 diff hist +98 PECVD Recipes →SiN (2% SiH4)
- 16:48, 3 October 2012 diff hist 0 N File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf current
- 16:47, 3 October 2012 diff hist +103 PECVD Recipes →SiN (2% SiH4)
- 16:46, 3 October 2012 diff hist -90 PECVD Recipes →SiN (2% SiH4)
- 16:36, 3 October 2012 diff hist 0 N File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf current
- 16:35, 3 October 2012 diff hist +1 PECVD Recipes →SiN (2% SiH4)
- 16:35, 3 October 2012 diff hist +6 PECVD Recipes →SiN (2% SiH4)