Difference between revisions of "SEM Sample Coater (Hummer)"
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|picture=SEMSample.jpg |
|picture=SEMSample.jpg |
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|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
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− | |super= |
+ | |super= Don Freeborn |
|location=Bay 1 |
|location=Bay 1 |
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|description = |
|description = |
Revision as of 11:12, 15 April 2020
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About
This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.