RIE Etching Recipes
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Dry Etching Recipes
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Contents
1
RIE 1 (Custom)
2
RIE 2 (MRC)
2.1
CdZnTe Etching (RIE 2)
3
RIE 3 (MRC)
4
RIE 5 (PlasmaTherm)
4.1
GaN Etching (RIE 5)
5
Si Deep RIE (PlasmaTherm/Bosch Etch)
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
[[media:|CdZnTe Etch Recipes]]
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
GaN Etching (RIE 5)
GaN Etch Recipes
Si Deep RIE (PlasmaTherm/Bosch Etch)
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