Difference between revisions of "RIE Etching Recipes"
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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| + | =[[RIE Etch 5 (RIE#5)]]= |
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| + | ==GaN Etching (RIE#5)== |
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| + | *[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
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| + | |||
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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Revision as of 15:47, 19 September 2013
Back to Dry Etching Recipes.