Difference between revisions of "RIE Etching Recipes"
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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| − | ==GaN Etching (RIE |
+ | ==GaN Etching (RIE 5)== |
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
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Revision as of 15:48, 19 September 2013
Back to Dry Etching Recipes.