Difference between revisions of "Process Group - Process Control Data"

Revision as of 11:46, 20 January 2023

These are the same links found on individual tool pages, in the Recipes > <<tool page>> > Process Control section.

Old data in a different format can be found below:

@@ Line 43: / Line 43: @@
 ===[[ICP Etching Recipes#Process Control Data .28Fluorine ICP Etcher.29|PlasmaTherm SLR Fluorine Etcher]]===
-*[[Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher|SiO<sub>2</sub> Etching with CHF3/CF4-Fluorine ICP Etcher]]
+*[https://docs.google.com/spreadsheets/d/15hYkCqL3UNNayt4sXrvVi4mBj-OSdnF7PE29mQW9AEY/edit?usp=sharing SiO<sub>2</sub> Etching with CHF3/CF4 - '''Etch Data''']
+*[https://docs.google.com/spreadsheets/d/15hYkCqL3UNNayt4sXrvVi4mBj-OSdnF7PE29mQW9AEY/edit?usp=sharing SiO<sub>2</sub> Etching with CHF3/CF4 - '''Plots''']
+**[[Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher|OLD - SiO<sub>2</sub> Etching with CHF3/CF4 (FL-ICP)]]
+***[[Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher|''No data prior to 2023-01-20'']]
 ===[[ICP Etching Recipes#Process Control Data .28Panasonic 1.29|Panasonic ICP #1]]===