Probe Station & Curve Tracer
The probe station in the cleanroom is set up for up to four-point probing of two terminal and three terminal devices. The probe station is a Signatone station with a 2” diameter vacuum chuck. Four probes are provided. The measurements are taken with an HP xxxx 4-point probe measuring system or on a Tektronix 370A programmable curve tracer. The curve tracer can be controlled by a computer to get portable data. FETs, HBTs, diodes, and contact resistance measurements are typically done on this system. The 370A curve tracer is capable of pulsed and DC operation.
- 4 probe station
- HP xxxx 4-point resistance meter
- Tektronix 370A computer controlled curve tracer
- Pulsed and DC characterization of 2 and 3 terminal devices in clean environment
- HP 4145 parametric semiconductor analyzer