Probe Station & Curve Tracer

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Probe Station & Curve Tracer
ProbeStation.jpg
Tool Type Inspection, Test and Characterization
Location Bay 4
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Probe Station
Manufacturer Various


About

The probe station in the cleanroom is set up for up to four-point probing of two terminal and three terminal devices. The probe station is a Signatone station with a 2” diameter vacuum chuck. Four probes are provided. The measurements are taken with an HP xxxx 4-point probe measuring system or on a Tektronix 370A programmable curve tracer. The curve tracer can be controlled by a computer to get portable data. FETs, HBTs, diodes, and contact resistance measurements are typically done on this system. The 370A curve tracer is capable of pulsed and DC operation.

Equipment Specifications

  • 4 probe station
  • HP xxxx 4-point resistance meter
  • Tektronix 370A computer controlled curve tracer
  • Pulsed and DC characterization of 2 and 3 terminal devices in clean environment
  • HP 4145 parametric semiconductor analyzer