Difference between revisions of "PECVD1 Recipes"
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* [[media:PECVD1-SiON-Recipe.pdf|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]] |
* [[media:PECVD1-SiON-Recipe.pdf|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]] |
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| − | *Deposition rate~11.21nm/min |
+ | *Deposition rate~11.21nm/min (users must calibrate this prior to critical deps) |
*HF e.r.~87nm/min |
*HF e.r.~87nm/min |
||
*Stress~476MPa |
*Stress~476MPa |
||
Revision as of 19:01, 21 May 2014
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
- SiN Standard Recipe
- SiN Data May 2014
- SiN 1000A Thickness uniformity 2014
- Low Stress Si3N4 - Variable Stress Recipes
- Low Stress Si3N4 - Variable Stress Plot
- Deposition rate~11.21nm/min (users must calibrate this prior to critical deps)
- HF e.r.~87nm/min
- Stress~476MPa
- Refractive Index~1.936
SiO2 deposition (PECVD #1)
- Deposition rate~35.73nm/min
- HF e.r.~610nm/min
- Stress~-402MPa
- Refractive Index~1.460