Difference between revisions of "Other Dry Etching Recipes"
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(Created page with "{{recipes|Dry Etching}}") |
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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| + | =[[XeF2 Etch (Xetch)]]= |
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| + | *[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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