Difference between revisions of "Other Dry Etching Recipes"
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=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
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*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
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| − | *[[media:|Au Etch Recipe]] |
+ | *[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Au Etch Recipe]] |