Difference between revisions of "Other Dry Etching Recipes"
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=[[Vapor HF Etch (uETCH)]]= |
=[[Vapor HF Etch (uETCH)]]= |
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*[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf|SiO<sub>2</sub> Etch Recipe 1]] |
*[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf|SiO<sub>2</sub> Etch Recipe 1]] |
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| − | *[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool- |
+ | *[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf|SiO<sub>2</sub> Etch Recipe 2]] |