Difference between revisions of "Other Dry Etching Recipes"
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=[[Vapor HF Etch (uETCH)]]= |
=[[Vapor HF Etch (uETCH)]]= |
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| − | *[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-1.pdf|SiO<sub>2</sub> Etch Recipe]] |
+ | *[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-1.pdf|SiO<sub>2</sub> Etch Recipe 1]] |
| − | *[[media:|SiO<sub>2</sub> Etch Recipe]] |
+ | *[[media:|SiO<sub>2</sub> Etch Recipe 2]] |
Revision as of 10:06, 30 January 2014
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
- SiO2 Etch Recipe 1
- [[media:|SiO2 Etch Recipe 2]]