Difference between revisions of "Other Dry Etching Recipes"
Jump to navigation
Jump to search
| Line 3: | Line 3: | ||
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
||
| + | =[[Vapor HF Etch (uETCH)]]= |
||
| + | *[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-1.pdf|SiO<sub>2</sub> Etch Recipe]] |
||
=[[Vapor HF Etch (uETCH)]]= |
=[[Vapor HF Etch (uETCH)]]= |
||
*[[media:|SiO<sub>2</sub> Etch Recipe]] |
*[[media:|SiO<sub>2</sub> Etch Recipe]] |
||
Revision as of 10:03, 30 January 2014
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
Vapor HF Etch (uETCH)
- [[media:|SiO2 Etch Recipe]]