Difference between revisions of "Other Dry Etching Recipes"
Jump to navigation
Jump to search
(Created page with "{{recipes|Dry Etching}}") |
|||
Line 1: | Line 1: | ||
{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
||
+ | =[[XeF2 Etch (Xetch)]]= |
||
+ | *[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |