MLA150 - Design Guidelines
The term Convert refers to the Unix conversion software used to import your CAD files into the MLA150Menu software.
CAD Design File Specifications
GDS aka. GDSii
- This is the preferred file format for import into the machine.
- Make note the "Cell" that you want to print, often called the "top cell" as it can contain a heirarchy of other child/instanced cells.
- This is called "GDS Structure" in the convert software.
Common export format for users of AutoCAD.
- DXF files can often lose the "units" when exported, meaning the Convert software may not know if a length of "10" means "10 mm" or "10 µm".
- Make sure to use Convert's [Viewer] and the [Measure] tool to make sure the scaling factors are correct.
The BMP Pixelsizes are shown in the BMP options when importing a file into Convert. The BMP pixel size can be adjusted to change the scaling of the bmp file (from 40 to 4000nm). The base pixel size is 40nm.
To Be Added
To Be Added
It has been suggested to use the "CD Bias" (Critical dimension) to reduce your feature sizes during the Convert process, and then compensate by going to higher exposure doses (widening the features back to original size). If you choose a "-200 nm" CD Bias, then run a Focus-Exposure Array ("Series" in MLAMenu), you will look for the higher/lower doses (depending on photoresist and design polarity) that bring the features back to the original designed sizes.
Overexposing alleviates the stitching boundaries.