Difference between revisions of "ICP Etching Recipes"
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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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==Single-step Si Etching (not Bosch!) (Si Deep RIE)== |
==Single-step Si Etching (not Bosch!) (Si Deep RIE)== |
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| − | *[[media:|Single-step Si Vertical Etch Recipe]] |
+ | *[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]] |
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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Revision as of 10:00, 25 September 2013
Back to Dry Etching Recipes.