Difference between revisions of "ICP Etching Recipes"
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| − | {{recipes|Dry Etching}} |
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| − | =[[XeF2 Etch (Xetch)]]= |
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| − | *[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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Revision as of 09:40, 24 September 2013
Back to Dry Etching Recipes.