Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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| − | =[[RIE Etch 5 (RIE#5)]]= |
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| − | ==GaN Etching (RIE#5)== |
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| − | *[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
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=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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==SiO<sub>2</sub> Etching (Panasonic 1)== |
==SiO<sub>2</sub> Etching (Panasonic 1)== |
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Revision as of 15:50, 19 September 2013
Back to Dry Etching Recipes.