Difference between revisions of "ICP Etching Recipes"
Jump to navigation
Jump to search
| Line 1: | Line 1: | ||
{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
||
| + | =[[RIE Etch 5 (RIE#5)]]= |
||
| + | ==GaN Etching (RIE#5)== |
||
| + | *[[media:|GaN Etch Recipe]] |
||
| + | |||
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
||
==SiO<sub>2</sub> Etching (Panasonic 1)== |
==SiO<sub>2</sub> Etching (Panasonic 1)== |
||
Revision as of 15:38, 19 September 2013
Back to Dry Etching Recipes.
RIE Etch 5 (RIE#5)
GaN Etching (RIE#5)
- [[media:|GaN Etch Recipe]]