Difference between revisions of "ICP Etching Recipes"

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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]=
 
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]=
 
==Single-step Si Etching (not Bosch!) (Si Deep RIE)==
 
==Single-step Si Etching (not Bosch!) (Si Deep RIE)==
*[[media:|Single-step Si Vertical Etch Recipe]]
+
*[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]]
  
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=

Revision as of 09:00, 25 September 2013