Difference between revisions of "ICP Etching Recipes"

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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
 
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
 
==GaN Etch (Unaxis VLR)==
 
==GaN Etch (Unaxis VLR)==
*[[media:|GaN Etch Recipe (85C)]]
+
*[[media:09-Plasma_Etching_of_GaN-UnaxisPM1.pdf|GaN Etch Recipe (85C)]]

Revision as of 13:14, 24 September 2013