Difference between revisions of "ICP Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 2: Line 2:
 
=[[XeF2 Etch (Xetch)]]=
 
=[[XeF2 Etch (Xetch)]]=
 
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]]
 
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]]
 
 
 
 
  
 
{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}

Revision as of 08:21, 24 September 2013