Difference between revisions of "ICP Etching Recipes"

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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
=[[RIE Etch 5 (RIE#5)]]=
 
==GaN Etching (RIE#5)==
 
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]]
 
 
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
==SiO<sub>2</sub> Etching (Panasonic 1)==
 
==SiO<sub>2</sub> Etching (Panasonic 1)==

Revision as of 14:50, 19 September 2013