Difference between revisions of "ICP Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 18: Line 18:
 
===InP Etch (H<sub>2</sub> Ar)===
 
===InP Etch (H<sub>2</sub> Ar)===
 
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
 
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
 +
 +
==Si Etch (XeF2 Etcher)==
 +
*[[media:|Si Etch Recipe]]

Revision as of 10:33, 17 September 2013