Difference between revisions of "Dry Etching Recipes"

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! bgcolor="#D0E7FF" align="center" | InGaAsP
 
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| {{rl|RIE Etching Recipes|InP Etch (RIE 2)}}
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| {{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
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! bgcolor="#D0E7FF" align="center" | InP
 
! bgcolor="#D0E7FF" align="center" | InP
 
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| {{rl|RIE Etching Recipes|InP Etch (RIE 2)}}
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| {{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
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Revision as of 10:17, 29 July 2016