Difference between revisions of "Don Freeborn"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(Linked the Fluorine etch page.)
 
(11 intermediate revisions by 3 users not shown)
Line 1: Line 1:
 
{{staff|{{PAGENAME}}
 
{{staff|{{PAGENAME}}
 
|position = Senior Development Engineer
 
|position = Senior Development Engineer
|room = 1109C
+
|room = 1109B
|phone = (805) 839-3918x216
+
|phone = (805) 839-7975
 
|cell =
 
|cell =
|email = dfreeborn@ece.ucsb.edu
+
|email = dfreeborn@ucsb.edu
 
}}
 
}}
   
 
=About=
 
=About=
   
  +
.
Current Work
 
 
Lorem ipsum dolor sit amet, consectetur adipiscing elit. Aenean aliquam sapien mattis urna tempus eu malesuada neque consectetur. Nulla molestie turpis eget felis interdum nec ullamcorper elit gravida. Donec tincidunt odio et neque feugiat et imperdiet neque congue. Suspendisse pretium pulvinar mi, a t
 
   
 
=Current Work=
 
=Current Work=
  +
.
Tools
 
   
 
=Tools=
 
=Tools=
{{PAGENAME}}
+
{{PAGENAME}} is in charge of the following tools:
is in charge of the following tools:
 
 
{|
 
{|
 
|- valign="top"
 
|- valign="top"
 
|
 
|
  +
*[[PECVD 1 (PlasmaTherm 790)]]
*
 
  +
*[[PECVD 2 (Advanced Vacuum)]]
*Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)
 
*[[Wafer Bonder (SUSS SB6-8E)]]
 
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
  +
*[[E-Beam 4 (CHA)]]
  +
*[[Surface Analysis (KLA/Tencor Surfscan)]]
 
||
 
||
  +
*[[Thermal Evap 1]]
*[[Plasma-Therm SLR: Fluorine ICP]]
 
*[[ICP Etch 1 (Panasonic E626I)]]
+
*[[Thermal Evap 2 (Solder)]]
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
 
*[[Spin Rinse Dryer (SemiTool)]]
 
*[[Spin Rinse Dryer (SemiTool)]]
  +
*[[Vacuum Sealer]]
*[[Chemical-Mechanical Polisher (Logitech)]]
 
  +
*[[SEM Sample Coater (Hummer)]]
  +
 
|}
 
|}

Latest revision as of 09:48, 28 October 2021

Don Freeborn
Position Senior Development Engineer
Room Number 1109B
Phone (805) 839-7975
E-Mail dfreeborn@ucsb.edu


About

.

Current Work

.

Tools

Don Freeborn is in charge of the following tools: