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Category:Dry Etch
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Tool List#Dry Etch
Pages in category "Dry Etch"
The following 21 pages are in this category, out of 21 total.
A
Ashers (Technics PEII)
C
CAIBE (Oxford Ion Mill)
Chemical-Mechanical Polisher (Logitech)
D
DSEIII (PlasmaTherm/Deep Silicon Etcher)
F
Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
H
HF Vapor Etch
I
ICP Etch 1 (Panasonic E626I)
ICP Etch 2 (Panasonic E640)
ICP-Etch (Unaxis VLR)
L
Laser Etch Monitoring
P
Plasma Activation (EVG 810)
Plasma Clean (Gasonics 2000)
Plasma Clean (YES EcoClean)
R
RIE 1 (Custom)
RIE 2 (MRC)
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
U
UV Ozone Reactor
V
Vapor HF Etch
Vapor HF Etch (uETCH)
X
XeF2 Etch (Xetch)
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