Atomic Layer Deposition Recipes

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Back to Vacuum Deposition Recipes.

Atomic Layer Deposition (Oxford FlexAL)

Al2O3 deposition (ALD)

AlN deposition (ALD)

HfO2 deposition (ALD)

Pt deposition (ALD)

  • Need Data

SiO2 deposition (ALD)

ZnO deposition (ALD)

  • Need Data Al:ZnO

ZrO2 deposition (ALD)

TiO2 deposition (ALD)

  • TiO2 200 recipe WJM_TDMAT_H2O_r2 water dose 1s (pdf file to be added)gives grow rate 0.9 A/cycle as measured by ellipsometer

TiN deposition (ALD)

  • Need Data