Difference between revisions of "Atomic Layer Deposition Recipes"

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*{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}
 
*{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}
 
*{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}
 
*{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}
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==SiO{{sub|2}} deposition==
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*{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}
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*{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}
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==ZrO{{sub|2}} deposition==
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*{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}

Revision as of 10:33, 6 September 2012