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- 16:49, 22 June 2018 diff hist +195 Lab Rules OLD 2018 →Nanofab Wipes: Non-shedding by request only, s/Pec described particulates a bit. Tag: Visual edit
- 16:46, 22 June 2018 diff hist 0 m Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: puncutation Tag: Visual edit
- 16:44, 22 June 2018 diff hist +45 m Frequently Asked Questions →General NanoFab Questions: record issues in tool logbook Tag: Visual edit
- 15:29, 22 June 2018 diff hist 0 Thermal Evaporation Recipes fixed table syntax, which caused both tables to land Outside the expected section
- 15:23, 22 June 2018 diff hist +4 m Thermal Evaporation Recipes corrected materials table subheading --> level 2 (was level 1)
- 15:05, 20 June 2018 diff hist +417 Template:Announcements pecvd1 s/w upgrade
- 13:53, 20 June 2018 diff hist -1 m Sputtering Recipes →Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit
- 13:31, 20 June 2018 diff hist -361 m Template:Announcements delted old notes
- 18:14, 18 June 2018 diff hist +126 N TEST PAGE testing link to gDrive MSDS folder current Tag: Visual edit
- 17:24, 15 June 2018 diff hist -23 Template:Announcements AFM up
- 17:23, 15 June 2018 diff hist +135 Template:Announcements IBD Update
- 17:22, 15 June 2018 diff hist +197 Template:Announcements RIE5 SiCl4 issue 5min max
- 17:20, 15 June 2018 diff hist +13 Chemical List - OLD 2018-09-05 H2O2 "30%" added Tag: Visual edit
- 15:05, 15 June 2018 diff hist +226 Template:Announcements stepper 2 up
- 15:04, 15 June 2018 diff hist -367 m Template:Announcements PECVD2 deleted
- 16:18, 12 June 2018 diff hist +21 m Template:Announcements pecvd2 retraining required
- 16:17, 12 June 2018 diff hist -185 Template:Announcements rie5 SiCl4 UP, deleted "lab open"
- 16:14, 11 June 2018 diff hist -583 Template:Announcements lab reopened update, deleted DSE wafer removed
- 11:07, 8 June 2018 diff hist +266 Template:Announcements afm down
- 09:33, 8 June 2018 diff hist +9 Template:Announcements dse update, up
- 11:46, 7 June 2018 diff hist +12 Template:Announcements less startling title for lab closed
- 11:45, 7 June 2018 diff hist +489 Template:Announcements lab shutdown Monday june 11
- 09:30, 7 June 2018 diff hist +128 ICP Etch 1 (Panasonic E646V) →About: additional description of Ashing chamber utility Tag: Visual edit
- 09:28, 7 June 2018 diff hist +135 ICP Etch 1 (Panasonic E646V) →Detailed Specifications: added chuck temperatures Tag: Visual edit
- 09:25, 7 June 2018 diff hist +52 ICP Etch 2 (Panasonic E626I) →Detailed Specifications: default chuck temp shown Tag: Visual edit
- 17:18, 6 June 2018 diff hist +15 Template:Announcements bench 7 heated bath update
- 16:19, 5 June 2018 diff hist +18 m Editing Tutorials changed headers to "heading" style Tag: Visual edit
- 16:18, 5 June 2018 diff hist +69 m Editing Tutorials rearrange, minor edits Tag: Visual edit
- 14:37, 5 June 2018 diff hist -211 Template:Announcements deleted rie5 broken wafer
- 17:19, 4 June 2018 diff hist +185 m Calculators + Utilities →Wet Etching: minor description updates Tag: Visual edit
- 17:00, 4 June 2018 diff hist +40 Template:Announcements RIE#5 SiCl4 update
- 16:59, 4 June 2018 diff hist +212 Template:Announcements rie5 wafers in chamber
- 13:41, 4 June 2018 diff hist +4 m Stepper 3 (ASML DUV) →Process Information: italics on sub-bullet Tag: Visual edit
- 13:40, 4 June 2018 diff hist +127 Stepper 3 (ASML DUV) →About: copied info to "process info" Tag: Visual edit
- 12:23, 4 June 2018 diff hist +131 Stepper 3 (ASML DUV) approx maximum wafer bow Tag: Visual edit
- 10:49, 31 May 2018 diff hist +296 ICP Etch 1 (Panasonic E646V) updates, listed SEMI-std. flats Tag: Visual edit
- 20:58, 30 May 2018 diff hist +67 Chemical List - OLD 2018-09-05 →Lithography Chemicals: bolded some stocked chemicals Tag: Visual edit
- 17:26, 30 May 2018 diff hist +12 Template:Announcements many updates
- 15:50, 30 May 2018 diff hist 0 m Chemical List - OLD 2018-09-05 →Lithography Chemicals Tag: Visual edit
- 15:50, 30 May 2018 diff hist +200 Chemical List - OLD 2018-09-05 →Lithography Chemicals: links to NMP MSDS/Datasheets Tag: Visual edit
- 15:31, 30 May 2018 diff hist +17 N File:AZ NMP RINSE MSDS.pdf AZ_NMP_RINSE_MSDS current
- 17:53, 22 May 2018 diff hist +232 N Usage Data and Statistics added link to NanoFab usage presenation Tag: Visual edit
- 09:16, 18 May 2018 diff hist +20 Field Emission SEM 2 (JEOL IT800SHL) added 25x25mm Tag: Visual edit
- 09:09, 18 May 2018 diff hist -238 Template:Announcements fab open, maintenance complete
- 21:40, 16 May 2018 diff hist 0 Template:Announcements rie5 date correction
- 21:40, 16 May 2018 diff hist +166 Template:Announcements RIE5 SiCl ETA
- 16:19, 16 May 2018 diff hist -124 Template:Announcements stepper 2 up
- 16:43, 15 May 2018 diff hist +246 Template:Announcements PECVD2 update
- 16:41, 15 May 2018 diff hist +42 Template:Announcements stepper 2 update
- 13:25, 14 May 2018 diff hist +386 Template:Announcements exhaust shutdown