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- 10:04, 15 August 2023 diff hist +134 Process Group - Process Control Data move TOC below intro Tag: Visual edit: Switched
- 10:03, 15 August 2023 diff hist +139 Process Group - Process Control Data description of process control data
- 09:58, 15 August 2023 diff hist +61 MediaWiki:Sidebar Added link to process control data pages
- 09:56, 9 August 2023 diff hist +183 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit
- 07:14, 9 August 2023 diff hist -16 Oxygen Plasma System Recipes →O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit
- 17:07, 8 August 2023 diff hist +443 Sputtering Recipes added Sputter 3 ignition issues Tag: Visual edit
- 20:42, 7 August 2023 diff hist +69 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added training procedure Tag: Visual edit
- 12:50, 7 August 2023 diff hist +119 Stepper 3 (ASML DUV) added minimum wafer thickness Tag: Visual edit
- 12:47, 7 August 2023 diff hist +89 m Wafer Bonder (Logitech WBS7) →Recipes: minro note of what is in the recipe sections Tag: Visual edit
- 13:54, 4 August 2023 diff hist +67 Maskless Aligner (Heidelberg MLA150) →About: link to greyscale limitations page. Tag: Visual edit
- 15:40, 2 August 2023 diff hist +630 Template:Announcements mla150 annc
- 10:04, 1 August 2023 diff hist +146 Oxygen Plasma System Recipes →O2-Only Recipes: note on dim plasma Tag: Visual edit
- 14:32, 30 July 2023 diff hist +1,820 MLA150 - Troubleshooting Greyscale limitations Tag: Visual edit
- 15:57, 20 July 2023 diff hist +172 Maskless Aligner (Heidelberg MLA150) →Video Trainings: note on training proceudre Tag: Visual edit
- 16:50, 18 July 2023 diff hist +13 Field Emission SEM 2 (JEOL IT800SHL) →Operating Procedures: uplaoded SOP v08.12 from Mitchell Tag: Visual edit
- 16:49, 18 July 2023 diff hist +40 N File:JEOL 7600F UserManual.pdf v08.12, from Bill Mitchell current
- 16:09, 17 July 2023 diff hist -19 m Oxygen Plasma System Recipes →O2 Recipe Characterization Tag: Visual edit
- 16:02, 17 July 2023 diff hist +1,512 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): updates, explained Gold oxidation etc. Placeholders for recipe names Tag: Visual edit
- 15:40, 17 July 2023 diff hist -8 Dry Etching Recipes deleted extra blank column, linked Technics & YES Ecoclean to recipes page. Tag: Visual edit
- 18:48, 8 July 2023 diff hist +155 Packaging Recipes →Photoresist: added to use squirt bottles. Tag: Visual edit
- 20:43, 7 July 2023 diff hist +18 UCSB NanoFab Microscope Training →Measurements Tag: Visual edit
- 05:29, 28 June 2023 diff hist +1 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset via IQC Tag: Visual edit
- 04:21, 28 June 2023 diff hist +220 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: explain how to bring warnings window to front Tag: Visual edit
- 04:17, 28 June 2023 diff hist +160 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added subheading for “exposing with IQC correction” Tag: Visual edit
- 12:10, 23 June 2023 diff hist +202 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to Manual edge bead removal page Tag: Visual edit
- 12:08, 23 June 2023 diff hist +96 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: minor description about ebr wicking / drying Tag: Visual edit
- 15:45, 21 June 2023 diff hist +64 Rapid Thermal Processor (SSI Solaris 150) Added “RTA” and abbreviations for searchability Tag: Visual edit
- 13:13, 20 June 2023 diff hist +6 m Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal Tag: Visual edit
- 22:37, 15 June 2023 diff hist +346 m Wet Etching Recipes table: link to Piranha section Tag: Visual edit
- 22:32, 15 June 2023 diff hist -1,111 m Wet Etching Recipes →Organic removal: headings for Organics Removal section Tag: Visual edit
- 22:15, 15 June 2023 diff hist +6 Wet Etching Recipes →Table of Wet Etching Recipes: InGaAs exothermic comment Tag: Visual edit
- 22:14, 15 June 2023 diff hist +97 Wet Etching Recipes →Table of Wet Etching Recipes: Added InP & InGaAs selective etches for stop-etch Tag: Visual edit
- 21:33, 15 June 2023 diff hist -238 Wet Etching Recipes →Table of Wet Etching Recipes: added selective substrate removal recipes for GaAs/AlGaAs (from Garrett Cole), oxide removal dips for InP, GaAs (from memory) Tag: Visual edit
- 10:27, 15 June 2023 diff hist +153 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info current Tag: Visual edit
- 14:01, 14 June 2023 diff hist +944 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
- 13:52, 14 June 2023 diff hist +232 Direct-Write Lithography Recipes →Positive Resist (MLA150): explain rehydration step Tag: Visual edit
- 13:38, 14 June 2023 diff hist +219 Direct-Write Lithography Recipes →Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit
- 13:23, 14 June 2023 diff hist +1 Template:Announcements →NanoFan Lab is UP: typo
- 16:05, 12 June 2023 diff hist +61 Wet Benches added NEVER heat: ISO, Toluene etc. Tag: Visual edit
- 11:42, 12 June 2023 diff hist +106 Wet Benches →Detailed Specifications: minor updates, clarified that NMP can be heated, ACE can not Tag: Visual edit
- 08:08, 8 June 2023 diff hist +258 Microscopes →Microscope #7: Olympus DSX1000 Digital Microscope (Bay 4): minor updates to specs Tag: Visual edit
- 23:37, 5 June 2023 diff hist +113 Surface Analysis (KLA/Tencor Surfscan) added high-particles images Tag: Visual edit
- 23:36, 5 June 2023 diff hist +38 N File:Surfscan 230113A7G2 after low particles.jpg current
- 23:35, 5 June 2023 diff hist +39 N File:Surfscan - 230113A7 Gain4 high particles.jpg current
- 12:08, 2 June 2023 diff hist 0 File:PECVD1 SiN Stress vs. N2 plot.jpg John d uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg current
- 11:55, 2 June 2023 diff hist -130 PECVD Recipes →Low Stress Si3N4 (PECVD#1): deleted process control data link Tag: Visual edit
- 11:55, 2 June 2023 diff hist +1 m PECVD Recipes →Low Stress Si3N4 (PECVD#1): indent image Tag: Visual edit: Switched
- 11:54, 2 June 2023 diff hist +428 PECVD Recipes →SiOxNy deposition (PECVD #1): added SiN stress vs. N2 plot Tag: Visual edit
- 11:52, 2 June 2023 diff hist +209 N File:PECVD1 SiN Stress vs. N2 plot.jpg
- 11:30, 1 June 2023 diff hist -64 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit