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- 08:50, 31 August 2018 diff hist +1,157 Editing Tutorials Making a new page section, with screenshots Tag: Visual edit
- 08:45, 31 August 2018 diff hist +43 N File:RedLink Screenshot.png current
- 08:42, 31 August 2018 diff hist +72 N File:Editing Tutorial - Hyperlink panel nonexisting page 01.png current
- 08:30, 31 August 2018 diff hist +47 N File:Editing Toolbar Hyperlink Button 01.png current
- 23:49, 30 August 2018 diff hist +146 Template:Announcements DUV scope update
- 07:45, 30 August 2018 diff hist +40 m Suss MA-6 Backside Alignment QuickStart explain "BSA" Tag: Visual edit
- 15:19, 29 August 2018 diff hist +449 Template:Announcements IBD down; Stepper 6300 maint.
- 17:19, 28 August 2018 diff hist -5 m Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): itlaics Tag: Visual edit
- 17:13, 28 August 2018 diff hist -149 m Atomic Layer Deposition Recipes →ZrO deposition (ALD CHAMBER 3): removed unneeded comment about HfO (which is already in the HfO section) Tag: Visual edit
- 17:11, 28 August 2018 diff hist +235 Atomic Layer Deposition Recipes →ZnO:Al deposition (ALD CHAMBER 1): described double-loop recipes Tag: Visual edit
- 17:09, 28 August 2018 diff hist +167 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added ZnO recipe. Tag: Visual edit
- 15:25, 28 August 2018 diff hist +296 Oxygen Plasma System Recipes →Ashers (Technics PEII): added SiN etch and chamber clean Tag: Visual edit
- 15:20, 28 August 2018 diff hist -21 m Dry Etching Recipes replace bottom link from SiDeepEtch → SLR Fluorine ICP Tag: Visual edit
- 15:00, 28 August 2018 diff hist -65 Dry Etching Recipes renamed/linked SiDeepRIE → SLR Fluorine ICP Tag: Visual edit
- 14:57, 28 August 2018 diff hist +24 Tool List →ICP-RIE: link to SLR Fluorine Etcher Tag: Visual edit
- 14:56, 28 August 2018 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) bolded the top note Tag: Visual edit: Switched
- 14:55, 28 August 2018 diff hist +51 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: linked to proper/new tool page Tag: Visual edit
- 14:53, 28 August 2018 diff hist +180 ICP Etching Recipes added SLR Fluorine, moved SiDeepRIE to bottom
- 14:53, 28 August 2018 diff hist +166 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) note indicate info is from pre-conversion Tag: Visual edit
- 14:51, 28 August 2018 diff hist +64 N Si Deep RIE (PlasmaTherm/Bosch Etch) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted current
- 14:51, 28 August 2018 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted
- 14:38, 28 August 2018 diff hist +440 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): note that the tool does not exist in this configuration any more Tag: Visual edit: Switched
- 14:25, 28 August 2018 diff hist +26 m Stepper 3 (ASML DUV) moved Test Reticles into Process info, othe rminor changes Tag: Visual edit
- 14:14, 24 August 2018 diff hist +6 m Photoluminescence PL Setup (Custom) header formats Tag: Visual edit
- 14:13, 24 August 2018 diff hist +355 Photoluminescence PL Setup (Custom) copied image/info from holography page
- 10:32, 24 August 2018 diff hist +146 N Photoluminescence PL Setup (Custom) iniital page, in progress Tag: Visual edit
- 10:12, 24 August 2018 diff hist +42 Tool List →Inspection, Test and Characterization: PL setup page link Tag: Visual edit
- 23:11, 22 August 2018 diff hist +4 m Talk:Tool List current
- 23:10, 22 August 2018 diff hist +325 N Talk:Tool List mention BrianT, switch Si_DeepRIE --> SLR Fluorine
- 16:03, 22 August 2018 diff hist 0 Tool List →Thermal Processing: corrected Logitech bonder model # & link Tag: Visual edit
- 16:02, 22 August 2018 diff hist +42 N Wafer Bonder (Logitech WSB7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number current
- 16:02, 22 August 2018 diff hist 0 m Wafer Bonder (Logitech WBS7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number
- 15:20, 22 August 2018 diff hist -15 m Wafer Bonder (Logitech WBS7) removed wrong picture
- 15:17, 22 August 2018 diff hist +288 N Wafer Bonder (Logitech WBS7) initial page, copied source from existing page
- 15:14, 22 August 2018 diff hist 0 Tool List correct Logitech link with model: WSB7 Tag: Visual edit
- 11:54, 22 August 2018 diff hist +77 Tool List →Thermal Processing: link to Logitech wafer bonder Tag: Visual edit
- 11:28, 18 August 2018 diff hist -27 Template:Announcements EBeam #2 heater repair
- 15:04, 16 August 2018 diff hist +188 m Filmetrics F40-UV Microscope-Mounted →About: minor text updates, curve fitting mentioned Tag: Visual edit
- 06:38, 15 August 2018 diff hist +39 Template:Announcements PECVD software upgrade
- 13:57, 14 August 2018 diff hist +127 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: max # connections Tag: Visual edit
- 10:45, 14 August 2018 diff hist 0 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: correct nanofabadmin email address Tag: Visual edit
- 10:43, 14 August 2018 diff hist +362 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: links to set your FTP client to limit # of connections Tag: Visual edit
- 07:36, 14 August 2018 diff hist +1,164 Frequently Asked Questions blocked form nanofiles solution/faq Tag: Visual edit
- 09:55, 7 August 2018 diff hist -96 Template:Announcements pecvd s/w upgrade date sept.
- 23:46, 5 August 2018 diff hist +354 m ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": updated description of plate Tag: Visual edit
- 23:40, 5 August 2018 diff hist +687 ASML Stepper 3 Dicing Guide Programming Added negative PR image Tag: Visual edit
- 09:34, 3 August 2018 diff hist +3,277 ASML Stepper 3 - UCSB Test Reticles →Coords for "UCSB_Cal" Calibration Patterns: added coords for each resolution_chart_ORIG Tag: Visual edit
- 08:07, 3 August 2018 diff hist -2 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: rename multipurpose to EBL Tag: Visual edit
- 22:35, 1 August 2018 diff hist -463 Template:Announcements Deleted old UP items
- 17:31, 1 August 2018 diff hist +44 m ASML Stepper 3 - UCSB Test Reticles White is Chrome, Striped area is Clear Tag: Visual edit