Difference between revisions of "Template:Announcements"
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+ | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | After extensive troubleshooting it looks like the cryo pump will need to be replaced. We are hopeful the system will be ready to run sometime tomorrow early afternoon. |
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| − | Tony |
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | The tool is up, intial film checks show same dep. rates as before. |
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| − | //[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | =====RIE 5 is up===== |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| + | //15:59, 22 May 2024 (PDT) |
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| − | =====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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| − | I'll send out an update in the next 2-3 days. |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | Thanks, |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| − | Replacing the battery on the board did not resolve the tool issue. |
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| + | Sorry for the inconvenience. |
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| − | Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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+ | =====ICP1 Down===== |
| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | The transfer arm installation has been postponed until next week due to other equipment being down at this time. |
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| − | The work is now scheduled for 2/21/24 - 2/22/24. |
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| − | Please plan accordingly. |
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| − | //[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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| − | =====Job Opening: Process Engineer===== |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| − | //[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Latest revision as of 15:59, 22 May 2024
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)