Difference between revisions of "Template:Announcements"
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| + | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| + | We have finished calibrations, |
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| + | System is up. |
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| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | =====Dicing Saw (ADT) Upgrade 10/9===== |
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| − | The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. |
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| − | I'll send out a couple of reminder emails between now and then and keep everyone updated in the event the schedule for this changes. |
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| ⚫ | |||
| + | //11:17, 24 May 2024 (PDT) |
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| − | =====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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| − | The tool has been scheduled for maintenance on 9-28-23 from 8:00am to 5:00pm. During this time the tool will be unavailable for use. Please plan your lab activities accordingly. |
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| ⚫ | |||
| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | JEOL has finished will the install and the SEM is available to use if you've received training on SEM #1. |
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| − | //[[User:Hopkins a|Hopkins a]] 15:32, 29 August 2023 (PDT) |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| − | =====EVG down Mon Sept 18th===== |
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| + | |||
| − | We will have an FSE onsite to install the new parts on the tool and verify it is operating correctly. I don't expect this to take more than a few days, but plan for the tool to be down all week. |
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| + | =====MA6 TSA is down - Update===== |
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| + | |||
| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| + | |||
| + | -Lee |
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| + | //15:59, 22 May 2024 (PDT) |
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| + | |||
| + | =====Velion FIB Tool DOWN===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | |||
| ⚫ | |||
| + | |||
| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | |||
| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| + | |||
| + | Sorry for the inconvenience. |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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| + | |||
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)