Difference between revisions of "Template:Announcements"
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | =====Lab Shutdown Reminder===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | To accommodate an annual test of the back-up generator we will be shutting down the lab on Wednesday June 14th from 7am to 8am. |
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| − | Please be out of the lab during this time. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 15:36, 9 June 2023 (PDT) |
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| − | ===== |
+ | =====MA6 TSA is down - Update===== |
| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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| − | Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | =====Plasma Activation (EVG 810)===== |
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| + | -Lee |
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| − | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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| + | //15:59, 22 May 2024 (PDT) |
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| − | Runs will still require Staff supervision until then. |
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| + | =====Velion FIB Tool DOWN===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| + | Sorry for the inconvenience. |
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| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 10:55, 23 May 2024
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)