Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====MLA Maintenance 6/24-6/27===== |
| + | The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the |
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| − | Finetech will be on-site Monday late morning or early afternoon to work on our system. |
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| + | evenings. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:35, 3 May 2023 (PDT) |
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| + | -Lee |
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| − | =====Plasma Activation (EVG 810)===== |
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| + | //15:59, 4 June 2024 (PDT) |
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| − | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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| + | |||
| + | =====EBeam4 is up===== |
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| + | EBeam4 is back up. |
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| + | |||
| + | The overnight regen of the cryo was completed this morning. |
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| + | I then tested the operation of the hoist numerous times without issue. |
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| + | I tested the EBeam by running 200A of Ti without issue. |
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| + | |||
| + | System UP |
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| + | |||
| + | //10:36, 30 May 2024 (PDT) |
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| + | |||
| + | =====Stepper #1 (GCA 6300) - Tool availability===== |
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| + | Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-18-24 at 8:00am |
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| + | Till |
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| + | 6-20-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | //13:32, 1 June 2024 (PDT) |
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| + | |||
| + | =====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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| + | Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-21-24 at 8:00am |
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| + | Till |
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| + | 6-21-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | |||
| + | Thanks |
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| + | Bill Millerski |
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| + | UCSB |
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| + | //13:32, 1 June 2024 (PDT) |
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| + | |||
| + | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| + | We have finished calibrations, |
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| + | System is up. |
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| + | |||
| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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| + | |||
| + | =====Unaxis VLR still Down===== |
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| + | |||
| + | The chiller has a decent sized ball of ice inside of it. |
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| + | |||
| + | I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. |
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| + | //13:29, 1 June 2024 (PDT) |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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| + | |||
| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| + | |||
| + | =====MA6 TSA is down - Update===== |
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| + | Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. |
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| + | |||
| + | Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: |
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| + | |||
| + | https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication |
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| + | |||
| + | -Lee |
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| + | //15:59, 22 May 2024 (PDT) |
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| + | |||
| + | =====Velion FIB Tool DOWN===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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| + | |||
| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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| − | Runs will still require Staff supervision until then. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 18:01, 2 May 2023 (PDT) |
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| − | =====E-Beam #4 (CHA) - EB4 is down===== |
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| − | We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 15:26, 28 April 2023 (PDT) |
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| − | =====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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| − | S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 13:54, 28 April 2023 (PDT) |
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| − | =====FEI SEM#1 Replacement Project===== |
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| − | The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT) |
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| − | <!--feedBurner name="UCSBNanofab-Announcements" /--> |
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| − | <!----------------------------------------------> |
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| − | <!------------- Equipment Status ----------------> |
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| − | ===== Unaxis Etch: Down ===== |
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| − | We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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| − | // [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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| − | ===== Au Plating: UP===== |
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| − | only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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| − | // [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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| − | <!---------- end of Equipment Status ------------> |
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Latest revision as of 15:59, 4 June 2024
MLA Maintenance 6/24-6/27
The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the evenings. -Lee //15:59, 4 June 2024 (PDT)
EBeam4 is up
EBeam4 is back up.
The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue.
System UP
//10:36, 30 May 2024 (PDT)
Stepper #1 (GCA 6300) - Tool availability
Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
6-18-24 at 8:00am Till 6-20-24 at 5:00pm
Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT)
Stepper #2 (GCA Autostep 200) - Tool availability
Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
6-21-24 at 8:00am Till 6-21-24 at 5:00pm
Please plan your processing activities accordingly.
Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT)
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT)
Unaxis VLR still Down
The chiller has a decent sized ball of ice inside of it.
I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT)
//Vraj Mehalana 11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)