Difference between revisions of "Template:Announcements"
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| + | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| − | None |
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| + | We have finished calibrations, |
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| − | =====E-Beam #4 (CHA) - EB4 is down===== |
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| + | System is up. |
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| − | We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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| + | |||
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| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | =====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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| + | |||
| − | S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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| − | // |
+ | //11:17, 24 May 2024 (PDT) |
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| − | =====FEI SEM#1 Replacement Project===== |
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | <!--feedBurner name="UCSBNanofab-Announcements" /--> |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| − | <!-- Description of the RSS feed --> |
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| + | |||
| + | =====MA6 TSA is down - Update===== |
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| + | |||
| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| + | |||
| + | -Lee |
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| + | //15:59, 22 May 2024 (PDT) |
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| + | |||
| + | =====Velion FIB Tool DOWN===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | |||
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| + | |||
| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | |||
| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| + | |||
| + | Sorry for the inconvenience. |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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| + | |||
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| − | <!----------------------------------------------> |
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| − | <!------------- Equipment Status ----------------> |
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| − | We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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| − | // [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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| − | ===== Au Plating: UP===== |
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| − | only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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| − | <!---------- end of Equipment Status ------------> |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)