Difference between revisions of "Vacuum Deposition Recipes"
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| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}} |
| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}} |
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| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
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+ | | {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
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Revision as of 10:43, 4 September 2013
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.