Difference between revisions of "High Temp Oven (Blue M)"
Jump to navigation
Jump to search
(added description of processes etc.) |
(tool id included for SUM link) |
||
(One intermediate revision by the same user not shown) | |||
Line 6: | Line 6: | ||
|description = High Temperature Oven |
|description = High Temperature Oven |
||
|manufacturer = Blue M Electric |
|manufacturer = Blue M Electric |
||
⚫ | |||
− | |materials = |
||
⚫ | |||
⚫ | |||
⚫ | |||
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Revision as of 10:55, 4 June 2019
|
The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.