Difference between revisions of "High Temp Oven (Blue M)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(added description of processes etc.)
(tool id included for SUM link)
(One intermediate revision by the same user not shown)
Line 6: Line 6:
 
|description = High Temperature Oven
 
|description = High Temperature Oven
 
|manufacturer = Blue M Electric
 
|manufacturer = Blue M Electric
 
|toolid=56
|materials =
 
 
}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
|toolid=
 
}}The Blue M oven has a Nitrogen purge and is programmable for up to 8 custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
 
   
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Revision as of 10:55, 4 June 2019

High Temp Oven (Blue M)
BlueMOven.jpg
Tool Type Lithography
Location Bay 5
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
Sign up for this tool


The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.