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...l micromirror device] ("DMD", an array of MEMS mirrors) for patterning the exposure light-field, to programmatically expose digitized patterns directly onto th Depending on the exposure options and write area, the MLA is able to expose a 100mm wafer in about 30

...e corrupted. Designs are prone to corruption if aborted partway through an exposure/conversion. ==Out Of Focus Exposures==