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  • Oxford ICP Etcher (PlasmaPro 100 Cobra)
    |description = ICP Etches for III-V/ALE |manufacturer = [https://www.oxinst.com Oxford Instruments]
    4 KB (532 words) - 23:33, 4 May 2023
  • Tool List
    | width="300" | | width="300" |
    7 KB (844 words) - 11:52, 1 March 2024
  • ICP Etching Recipes
    ...h SEM Example 01.png|alt=Example SEM image|none|thumb|465x465px|Example of 100µm Deep Bosch Etched Silicon posts with hard mask. Close inspection shows t ...tle=ICP_Etching_Recipes#Al2O3_Etching_.28Panasonic_2.29 Al2O3 in Panasonic ICP 1/2]
    28 KB (4,350 words) - 17:09, 9 April 2024
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