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  • RIE Etching Recipes
    *[//wiki.nanotech.ucsb.edu/w/images/f/f5/11-CZT_etching-1.pdf CdZnTe Etch Recipes - CH<sub>4</sub>-H<sub>2</sub *[//wiki.nanotech.ucsb.edu/w/images/b/b4/ZnS_Plasma_Etch-1.pdf ZnS Etch Recipe - CH<sub>4</sub>-H<sub>2</sub>-A
    2 KB (253 words) - 10:02, 14 June 2021
  • Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher
    |SEM Images |[https://wiki.nanotech.ucsb.edu/w/images/0/0b/FE210206.pdf]
    322 bytes (44 words) - 18:37, 2 February 2021
  • Test Data of etching SiO2 with CHF3/CF4-Florine
    |SEM Images
    264 bytes (34 words) - 18:33, 2 February 2021
  • Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher
    |SEM Images |[https://wiki.nanotech.ucsb.edu/w/images/0/0b/FE210206.pdf]
    322 bytes (44 words) - 18:30, 2 February 2021
  • DUV Flood Expose
    ==Spectra Images== *[https://wiki.nanofab.ucsb.edu/w/images/8/89/DUV_Flood_Expose_SOP_Rev_C.pdf DUV Flood Expose Standard Operating Pro
    1 KB (207 words) - 15:40, 4 January 2024
  • Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)
    |SEM Images |[https://wiki.nanotech.ucsb.edu/wiki/images/f/f1/SiO2_Etch_using_ICP2_with_O2.pdf]
    707 bytes (100 words) - 18:26, 6 April 2020
  • InP Etch Rate and Selectivity (InP/SiO2)
    | colspan="4" |[https://wiki.nanotech.ucsb.edu/w/images/4/45/IP210201.pdf 1.4] mT, 125/800W, Cl2/H2/Ar flow-rate=6.3/12.7/2 sccm, |[https://wiki.nanotech.ucsb.edu/wiki/images/9/9b/IP161332.pdf]
    4 KB (459 words) - 18:00, 8 November 2021
  • Unaxis VLR Etch - Process Control Data
    |'''SEM Images''' ...is_111822_002.jpg <nowiki>[30D]</nowiki>][https://wiki.nanotech.ucsb.edu/w/images/c/cd/CS_unaxis_111822_003.jpg <nowiki>[CS]</nowiki>]
    5 KB (717 words) - 18:41, 21 November 2022
  • FIJI - Microscope Measurement Tools
    ...s UCSB NanoFab users to make calibrated measurements on microscope and SEM images with freely available software, after the image acquisition. == SEM Images ==
    5 KB (689 words) - 11:02, 10 June 2019
  • XeF2 Etch (Xetch)
    *[//wiki.nanotech.ucsb.edu/w/images/7/7b/Xactic-XetchX3-System-Manual.pdf System Manual] *[//wiki.nanotech.ucsb.edu/w/images/c/c0/XeF2-Results.pdf Si Etching Profile & Results]
    2 KB (323 words) - 15:03, 30 October 2023
  • Test Data of etching SiO2 with CHF3/CF4-ICP1
    |'''SEM Images''' ...n1_011123_002.jpg <nowiki>[30D]</nowiki>][https://wiki.nanotech.ucsb.edu/w/images/5/52/Cs_pan1_011123_002.jpg <nowiki>[CS]</nowiki>]
    7 KB (936 words) - 09:54, 12 January 2023
  • Thermal Evap 2 (Solder)
    *[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions]
    963 bytes (123 words) - 10:29, 30 August 2022
  • UV Ozone Reactor
    *[https://wiki.nanofab.ucsb.edu/w/images/3/3e/UV_Ozone_SOP_Rev_A.pdf UV Ozone Reactor SOP] *[//wiki.nanotech.ucsb.edu/wiki/images/7/79/UV_Ozone_Manual_Jelight_M-144AX.pdf UV Ozone Manual]
    961 bytes (145 words) - 09:17, 29 August 2023
  • Services
    #Submit a Detailed [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx project description #[//wiki.nanotech.ucsb.edu/w/images/a/a2/UCSB-Facilities-Use-Agreement.pdf UCSB Facility Use Agreement (downloa
    10 KB (1,453 words) - 21:55, 9 January 2024
  • Lift-Off with DUV Imaging + PMGI Underlayer
    Please see our [https://wiki.nanotech.ucsb.edu/w/images/b/bc/Liftoff-Techniques.pdf Bi-Layer Lift-Off Tutorial] to understand the l ===Images / Examples===
    4 KB (608 words) - 16:32, 27 April 2022
  • ASML 5500 Mask Making Guidelines
    ...2063 part 2 of the training video] or [https://wiki.nanotech.ucsb.edu/wiki/images/c/cd/ASML_Job_Set-Up_Guide_simple_v1.pdf p. 7 of the programming instructio ...cessively long, in addition to hitting software limits on # of distributed Images.
    9 KB (1,494 words) - 11:04, 1 December 2023
  • Oxford Etcher - Sample Size Effect on Etch Rate
    !SEM Images |[https://wiki.nanotech.ucsb.edu/w/images/9/90/2022-01-11_Oxford_InP_Ridge_Wiki_Post_-_Cal01.pdf]
    2 KB (256 words) - 16:05, 20 March 2023
  • Measurements and Imaging with Amscope Camera - Quickstart Usage Guide
    #Click the Camera in the software to begin acquiring images in the software:[[File:Amscope 02 annot camera link.png|alt=screenshot of s ...n menu called '''Magnification''', which is used for measuring <u>live</u> images. (This is also available from the top "Options" pull down menu). Choose th
    4 KB (636 words) - 16:57, 16 October 2023
  • Tube Furnace (Tystar 8300)
    [//wiki.nanotech.ucsb.edu/w/images/8/89/TystarMechDrawWaferBoat.pdf Tystar Wafer Boat Drawing - 4" Wafer with *[//wiki.nanotech.ucsb.edu/w/images/8/8a/Tystar_Operational_Procedure.pdf Operating Instructions]
    4 KB (580 words) - 11:15, 7 March 2024
  • Sputtering Recipes
    *[//wiki.nanotech.ucsb.edu/wiki/images/1/15/Fe_and_Co_Films_using_Sputter-3.pdf Fe and Co Deposition Recipe] *[//wiki.nanotech.ucsb.edu/wiki/images/5/5e/Cu_Film_using_Sputter-3.pdf Cu Deposition Recipe]
    16 KB (2,290 words) - 21:36, 21 September 2023

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