Difference between revisions of "YES-SPR220-Various-Temps"
Jump to navigation
Jump to search
m (smaller figure) |
(add 220-7 etch rates vs temperature) |
||
| Line 1: | Line 1: | ||
Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
||
| + | [[File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png|thumb|551.989x551.989px]] |
||
| − | |||
[[File:YES-SPR220vsTemp.jpg|578x578px]] |
[[File:YES-SPR220vsTemp.jpg|578x578px]] |
||
| + | <br /> |
||
_vs._Temp(C)_Recipe_STD_O2only_3KW-3min-Temp_(1).png)
