Difference between revisions of "YES-SPR220-Various-Temps"
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(add 220-7 etch rates vs temperature) |
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Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
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− | [[File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png|thumb|551.989x551.989px]] |
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− | [[File:YES-SPR220vsTemp.jpg|578x578px]] |
+ | [[File:YES-SPR220vsTemp.jpg|578x578px]]<br /> |
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