Wet Etching Recipes
Revision as of 11:06, 6 November 2013 by Bovington j (talk | contribs) (→Compound Semiconductor Etching)
Compound Semiconductor Etching
| Material | Etchant | Rate (nm/min) | Anisotropy | Selective to | Selectivity | Ref. | Notes | Confirmed by | Header text |
|---|---|---|---|---|---|---|---|---|---|
| InP | Example | Example | Example | Example | Example | Example | Example | Example | Example |
| GaAs | Example | Example | Example | Example | Example | Example | Example | Example | Example |
| GaN | Example | Example | Example | Example | Example | Example | Example | Example | Example |