Thermal Evap 2 (Solder)

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Thermal Evap 2 (Solder)
Thermal2.jpg
Location Bay 3
Tool Type Vacuum Deposition
Manufacturer Custom
Description ?

Primary Supervisor Michael Barreraz
(805) 893-4147
mikebarreraz@ece.ucsb.edu

Secondary Supervisor

Don Freeborn


Recipes Vacuum Deposition RecipesN/A

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About

Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.

Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.

Detailed Specifications

Wafers up to 12" can be mounted.

Documentation

Recipes