Thermal Evap 2 (Solder)
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin.
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
Wafers up to 12" can be mounted.
- Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2
- Visit this page for the materials tables and evaporation parameters.