Information for "Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer)"

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Display titleTest Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer)
Default sort keyTest Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer)
Page length (in bytes)419
Page ID63374
Page content languageen - English
Page content modelwikitext
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Page creatorNingcao (talk | contribs)
Date of page creation08:21, 9 October 2018
Latest editorJcrode (talk | contribs)
Date of latest edit18:31, 6 April 2020
Total number of edits10
Total number of distinct authors3
Recent number of edits (within past 90 days)1
Recent number of distinct authors1