Difference between revisions of "Template:LithRecipe Table"
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(added example visual) |
(correct Maskless aligner link) |
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| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]] |
| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]] |
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| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 3 (ASML DUV)|Stepper 3<br>(ASML DUV)]] |
| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 3 (ASML DUV)|Stepper 3<br>(ASML DUV)]] |
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| − | | width="100" bgcolor="#DAF1FF" | [[ |
+ | | width="100" bgcolor="#DAF1FF" | [[Maskless Aligner Recipes|MLA150<br>(Heidelberg)]]</includeonly> |
<noinclude> |
<noinclude> |
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Latest revision as of 23:25, 13 September 2020
| SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
Used on the Lithography Recipes page to repeat the Table header multiple times.